http://ir-heat-zone.com/zh/tags/%E6%BF%80%E5%85%89/ Recent content in 激光 on Infrared Heating Zone Solutions Hugo zh Sat, 06 Jun 2026 03:58:25 +0800 http://ir-heat-zone.com/zh/posts/laser-wafer-dicing-support-heater/ Sat, 06 Jun 2026 03:58:25 +0800 http://ir-heat-zone.com/zh/posts/laser-wafer-dicing-support-heater/ <p><img src="http://ir-heat-zone.com/images/1764273a9805a56244015746cb190d47.png" alt="激光晶圆切割支撑加热器"></p> <p>在晶圆厂车间，激光切割的关键在于热管理。如果控制不当，微裂纹会扩展，切缝锥度会变大，切割后的缺陷会导致通过光刻和刻蚀工艺的晶圆报废。解决方案不是临时措施，而是在切割步骤中就在关键位置配备专用支撑加热器。</p>