Uniformity photoresist bake lamp
On the line, photoresist profile is set in the first bake. A 5°C swing across the wafer skews CD, ruins overlay, and wastes expensive rework. We...
Precision temperature photoresist heater
On the lithography floor, a 0.5°C drift in bake temperature is enough to scrap a full lot. The photoresist on those wafers has a tight thermal...
Photoresist drying infrared module
On the lithography floor, a half-degree drift in photoresist soft bake is enough to push critical dimension (CD) control out of spec. Wafers back up,...